Formation of amorphous Yb2O3/crystalline ZrTiO4 gate stack...

Applied Surface Science 2014 / 04 Vol. 299

Formation of amorphous Yb2O3/crystalline ZrTiO4 gate stack and its application in n-MOSFET with sub-nm EOT

Lin, Chia-Chun, Wu, Yung-Hsien, Wu, Chao-Yi, Lee, Ching-Wei
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
299
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2014.01.182
Date:
April, 2014
File:
PDF, 1.46 MB
english, 2014
Conversion to is in progress
Conversion to is failed