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Quantum Limit of Quality Factor in Silicon Micro and Nano Mechanical Resonators
Ghaffari, Shirin, Chandorkar, Saurabh A., Wang, Shasha, Ng, Eldwin J., Ahn, Chae H., Hong, Vu, Yang, Yushi, Kenny, Thomas W.Volume:
3
Language:
english
Journal:
Scientific Reports
DOI:
10.1038/srep03244
Date:
November, 2013
File:
PDF, 566 KB
english, 2013