Preparation of ZnO films with variable electric...

Applied Surface Science 2014 / 06 Vol. 303

Preparation of ZnO films with variable electric field-assisted atomic layer deposition technique

Lu, Weier, Dong, Yabin, Li, Chaobo, Xia, Yang, Liu, Bangwu, Xie, Jing, Li, Nan, Zhang, Yanqing
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Volume:
303
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2014.02.097
Date:
June, 2014
File:
PDF, 2.50 MB
english, 2014
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