Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2001 Vol. 19; Iss. 6
Initial surface reactions between Cl[sub 2] molecules and the GaAs (001) 2×4 surface
Tanaka, Yu, Ozeki, MasashiVolume:
19
Year:
2001
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.1414118
File:
PDF, 330 KB
english, 2001