Initial surface reactions between Cl[sub 2] molecules and...

Initial surface reactions between Cl[sub 2] molecules and the GaAs (001) 2×4 surface

Tanaka, Yu, Ozeki, Masashi
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Volume:
19
Year:
2001
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.1414118
File:
PDF, 330 KB
english, 2001
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