Ion sources for ion implantation technology (invited)a)

Review of Scientific Instruments 2014 / 02 Vol. 85; Iss. 2

Ion sources for ion implantation technology (invited)a)

Sakai, Shigeki, Hamamoto, Nariaki, Inouchi, Yutaka, Umisedo, Sei, Miyamoto, Naoki
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Volume:
85
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4852315
Date:
February, 2014
File:
PDF, 1.12 MB
english, 2014
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