Model Predictive Control of...

IEEE Transactions on Semiconductor Manufacturing 2007 / 05 Vol. 20; Iss. 2

Model Predictive Control of ${\hbox{Si}}_{1-x}{\hbox{Ge}}_{x}$ Thin Film Chemical–Vapor Deposition

Middlebrooks, Scott A., Rawlings, James B.
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Volume:
20
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/TSM.2007.895203
Date:
May, 2007
File:
PDF, 614 KB
english, 2007
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