Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2011 Vol. 29; Iss. 5
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Influence of sputtering pressure on band gap of Zn1−xMgxO thin films prepared by radio frequency magnetron sputtering
Wang, Dapeng, Narusawa, Tadashi, Kawaharamura, Toshiyuki, Furuta, Mamoru, Li, ChaoyangVolume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3622316
File:
PDF, 821 KB
english, 2011