Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2005 Vol. 23; Iss. 6
Filling high aspect-ratio nano-structures by atomic layer deposition and its applications in nano-optic devices and integrations
Wang, Jian Jim, Deng, Xuegong, Varghese, Ron, Nikolov, Anguel, Sciortino, Paul, Liu, Feng, Chen, Lei, Liu, XiaomingVolume:
23
Year:
2005
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.2132326
File:
PDF, 1.32 MB
english, 2005