Fabrication of PDMS microlens array by digital maskless grayscale lithography and replica molding technique
Zhong, Kejun, Gao, Yiqing, Li, Feng, Zhang, Zhimin, Luo, NingningVolume:
125
Language:
english
Journal:
Optik - International Journal for Light and Electron Optics
DOI:
10.1016/j.ijleo.2013.10.082
Date:
May, 2014
File:
PDF, 1.02 MB
english, 2014