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Plasma-enhanced growth and composition of silicon oxynitride films
Denisse, C. M. M., Troost, K. Z., Oude Elferink, J. B., Habraken, F. H. P. M., van der Weg, W. F., Hendriks, M.Volume:
60
Year:
1986
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.337117
File:
PDF, 640 KB
english, 1986