[IEEE 1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 - Kyoto, Japan (22-26 June 1998)] 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) - A high-current negative ion implanter and its application for nanocrystal fabrication in insulators
Kishimoto, N., Takeda, Y., Gritsyna, V.T., Iwamoto, I., Saito, T.Volume:
1
Year:
1998
Language:
english
DOI:
10.1109/IIT.1999.812123
File:
PDF, 460 KB
english, 1998