Modeling radiation-induced carbon contamination of extreme...

Modeling radiation-induced carbon contamination of extreme ultraviolet optics

Hollenshead, Jeromy, Klebanoff, Leonard
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
24
Year:
2006
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.2140005
File:
PDF, 846 KB
english, 2006
Conversion to is in progress
Conversion to is failed