Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2006 Vol. 24; Iss. 1
![](/img/cover-not-exists.png)
Modeling radiation-induced carbon contamination of extreme ultraviolet optics
Hollenshead, Jeromy, Klebanoff, LeonardVolume:
24
Year:
2006
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.2140005
File:
PDF, 846 KB
english, 2006