[IEEE 2012 17th Asia and South Pacific Design Automation Conference (ASP-DAC) - Sydney, Australia (2012.01.30-2012.02.2)] 17th Asia and South Pacific Design Automation Conference - Hybrid lithography optimization with E-Beam and immersion processes for 16nm 1D gridded design
Du, Yuelin, Zhang, Hongbo, Wong, Martin D.F., Chao, Kai-YuanYear:
2012
Language:
english
DOI:
10.1109/ASPDAC.2012.6165047
File:
PDF, 221 KB
english, 2012