MEMS Piezoelectric Pressure Sensor-modelling and Simulation
Kutiš, Vladimír, Dzuba, Jaroslav, Paulech, Juraj, Murín, Justín, Lalinský, TiborVolume:
48
Year:
2012
Language:
english
Journal:
Procedia Engineering
DOI:
10.1016/j.proeng.2012.09.523
File:
PDF, 453 KB
english, 2012