Atomic layer deposition of TiN for the fabrication of...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2013 Vol. 31; Iss. 2

Atomic layer deposition of TiN for the fabrication of nanomechanical resonators

Nelson-Fitzpatrick, Nathan, Guthy, Csaba, Poshtiban, Somayyeh, Finley, Eric, Harris, Kenneth D., Worfolk, Brian J., Evoy, Stephane
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Volume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4790132
File:
PDF, 1.63 MB
english, 2013
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