Low-cost Xe sputtering of amorphous In-Ga-Zn-O thin-film...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2014 / 03 Vol. 32; Iss. 2

Low-cost Xe sputtering of amorphous In-Ga-Zn-O thin-film transistors by rotation magnet sputtering incorporating a Xe recycle-and-supply system

Goto, Tetsuya, Ishii, Hidekazu, Sugawa, Shigetoshi, Ohmi, Tadahiro
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Volume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4835775
Date:
March, 2014
File:
PDF, 1.70 MB
english, 2014
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