Gas flow through microtubes with different internal surface...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2014 / 03 Vol. 32; Iss. 2

Gas flow through microtubes with different internal surface coatings

Hadj Nacer, M., Graur, I., Perrier, P., Méolans, J. G., Wuest, M.
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Volume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4828955
Date:
March, 2014
File:
PDF, 494 KB
english, 2014
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