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Atomic layer deposition of molybdenum oxide using bis(tert-butylimido)bis(dimethylamido) molybdenum
Bertuch, Adam, Sundaram, Ganesh, Saly, Mark, Moser, Daniel, Kanjolia, RaviVolume:
32
Year:
2014
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4843595
File:
PDF, 1.56 MB
english, 2014