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On the Deposition Rates of Magnetron Sputtered Thin Films at Oblique Angles
Alvarez, Rafael, Garcia-Martin, Jose M., Lopez-Santos, Maria C., Rico, Victor, Ferrer, Francisco J., Cotrino, Jose, Gonzalez-Elipe, Agustin R., Palmero, AlbertoVolume:
11
Language:
english
Journal:
Plasma Processes and Polymers
DOI:
10.1002/ppap.201300201
Date:
June, 2014
File:
PDF, 387 KB
english, 2014