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Carbon Ion Production Using a High-Power Impulse Magnetron Sputtering Glow Plasma
Yukimura, Ken, Nakano, Hisato Ogiso Shizuka, Nakao, Setsuo, Takaki, KoichiVolume:
41
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/TPS.2013.2280916
Date:
October, 2013
File:
PDF, 3.08 MB
english, 2013