Influence of the bias voltage on the structure and mechanical performance of nanoscale multilayer CrAlYN∕CrN physical vapor deposition coatings
Sáfrán, G., Reinhard, C., Ehiasarian, A. P., Barna, P. B., Székely, L., Geszti, O., Hovsepian, P. Eh.Volume:
27
Year:
2009
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3065675
File:
PDF, 1.11 MB
english, 2009