Influence of inert gases on the reactive high power pulsed magnetron sputtering process of carbon-nitride thin films
Schmidt, Susann, Czigány, Zsolt, Greczynski, Grzegorz, Jensen, Jens, Hultman, LarsVolume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4769725
File:
PDF, 2.11 MB
english, 2013