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High power impulse magnetron sputtering using a rotating cylindrical magnetron
Leroy, W. P., Mahieu, S., Depla, D., Ehiasarian, A. P.Volume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3271136
File:
PDF, 407 KB
english, 2010