Accurate characterization of thin films on rough surfaces by spectroscopic ellipsometry
Siah, S.C., Hoex, B., Aberle, A.G.Volume:
545
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.07.067
Date:
October, 2013
File:
PDF, 1.08 MB
english, 2013