Study on the effect of target on plasma parameters of...

Physics of Plasmas 2013 Vol. 20; Iss. 10

Study on the effect of target on plasma parameters of magnetron sputtering discharge plasma

Saikia, P., Kakati, B., Saikia, B. K.
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Volume:
20
Year:
2013
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.4825235
File:
PDF, 1.52 MB
english, 2013
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