Low-Loss Titanium Dioxide Strip Waveguides Fabricated by Atomic Layer Deposition
Hayrinen, Markus, Roussey, Matthieu, Gandhi, Vishal, Stenberg, Petri, Saynatjoki, Antti, Karvonen, Lasse, Kuittinen, Markku, Honkanen, SeppoVolume:
32
Language:
english
Journal:
Journal of Lightwave Technology
DOI:
10.1109/JLT.2013.2291960
Date:
January, 2014
File:
PDF, 417 KB
english, 2014