Effects of substrate bias voltage and target sputtering...

Materials Chemistry and Physics 2014 / 06 Vol. 145; Iss. 3

Effects of substrate bias voltage and target sputtering power on the structural and tribological properties of carbon nitride coatings

Wang, Pengfei, Takeno, Takanori, Fontaine, Julien, Aono, Masami, Adachi, Koshi, Miki, Hiroyuki, Takagi, Toshiyuki
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Volume:
145
Language:
english
Journal:
Materials Chemistry and Physics
DOI:
10.1016/j.matchemphys.2014.02.032
Date:
June, 2014
File:
PDF, 1.08 MB
english, 2014
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