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Study of the effects of a transverse magnetic field on radio frequency argon discharges by two-dimensional particle-in-cell-Monte-Carlo collision simulations
Fan, Yu, Zou, Ying, Sun, Jizhong, Stirner, Thomas, Wang, DezhenVolume:
20
Year:
2013
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.4826215
File:
PDF, 6.05 MB
english, 2013