Specular electron scattering in metallic thin films

Specular electron scattering in metallic thin films

Egelhoff, W. F., Chen, P. J., Powell, C. J., Parks, D., Serpa, G., McMichael, R. D., Martien, D., Berkowitz, A. E.
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Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.590812
File:
PDF, 305 KB
english, 1999
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