Laser-induced convection nanostructures on SiON/Si...

Laser-induced convection nanostructures on SiON/Si interface

Maksimović, A., Lugomer, S., Geretovszky, Zs., Szörényi, T.
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Volume:
104
Year:
2008
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3043881
File:
PDF, 833 KB
english, 2008
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