Improved planar isolation with buried-channel MOS FET's
H. Sunami, Y. Kawamoto, K. Shimohigashi, N. HashimotoVolume:
24
Year:
1984
Language:
english
Pages:
23
DOI:
10.1016/0026-2714(84)90480-3
File:
PDF, 620 KB
english, 1984