Local oxidation of metal and metal nitride films

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2004 Vol. 22; Iss. 4

Local oxidation of metal and metal nitride films

Farkas, N., Tokash, J. C., Zhang, G., Evans, E. A., Ramsier, R. D., Dagata, J. A.
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Volume:
22
Year:
2004
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1723269
File:
PDF, 411 KB
english, 2004
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