Pressure sensitivity of piezoresistive nickel–carbon...

Sensors and Actuators A: Physical 2013 / 4 Vol. 193

Pressure sensitivity of piezoresistive nickel–carbon Ni:a-C:H thin films

Uhlig, Steffen, Schmid-Engel, Hanna, Speicher, Tobias, Schultes, Günter
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Volume:
193
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2012.12.027
Date:
April, 2013
File:
PDF, 737 KB
english, 2013
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