Effect of width on the stress-induced bending of...

Journal of Micromechanics and Microengineering 2003 / 01 Vol. 13; Iss. 1

Effect of width on the stress-induced bending of micromachined bilayer cantilevers

Hou, Max Ti-Kuang, Chen, Rongshun
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Volume:
13
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/13/1/320
Date:
January, 2003
File:
PDF, 572 KB
english, 2003
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