RF plasma selective etching of boron nitride films
Werbowy, A., Szmidt, J., Sokołowska, A., Mitura, S.Volume:
9
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(99)00207-1
Date:
April, 2000
File:
PDF, 661 KB
english, 2000