On nitrogen incorporation during PE-CVD of diamond films

Diamond and Related Materials 1998 / 2 Vol. 7; Iss. 2-5

On nitrogen incorporation during PE-CVD of diamond films

Vandevelde, T., Nesladek, M., Meykens, K., Quaeyhaegens, C., Stals, L.M., Gouzman, I., Hoffman, A.
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Volume:
7
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(97)00208-2
Date:
February, 1998
File:
PDF, 636 KB
english, 1998
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