Analytic expressions for atomic layer deposition: Coverage,...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2014 / 05 Vol. 32; Iss. 3

Analytic expressions for atomic layer deposition: Coverage, throughput, and materials utilization in cross-flow, particle coating, and spatial atomic layer deposition

Yanguas-Gil, Angel, Elam, Jeffrey W.
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Volume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4867441
Date:
May, 2014
File:
PDF, 900 KB
english, 2014
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