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Time-resolved surface infrared spectroscopy during atomic layer deposition of TiO2 using tetrakis(dimethylamido)titanium and water
Sperling, Brent A., Hoang, John, Kimes, William A., Maslar, James E., Steffens, Kristen L., Nguyen, Nhan V.Volume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4872166
Date:
May, 2014
File:
PDF, 949 KB
english, 2014