Capacitance and conductance versus voltage characterization...

Capacitance and conductance versus voltage characterization of Al2O3 layers prepared by plasma enhanced atomic layer deposition at 25 °C≤ T ≤ 200 °C

Henkel, Karsten, Gargouri, Hassan, Gruska, Bernd, Arens, Michael, Tallarida, Massimo, Schmeißer, Dieter
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
32
Year:
2014
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4831897
File:
PDF, 1015 KB
english, 2014
Conversion to is in progress
Conversion to is failed