4507852 Method for making a reliable OHMIC contact between...

4507852 Method for making a reliable OHMIC contact between two layers of integrated circuit metallizations

PramodC Karulkar
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Volume:
26
Year:
1986
Language:
english
Pages:
2
DOI:
10.1016/0026-2714(86)90737-7
File:
PDF, 153 KB
english, 1986
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