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Investigation of block depth distribution in PS- b -PMMA block copolymer using ultra-low-energy cesium sputtering in ToF-SIMS
Terlier, T., Tiron, R., Gharbi, A., Chevalier, X., Veillerot, M., Martinez, E., Barnes, J.-P.Volume:
46
Language:
english
Journal:
Surface and Interface Analysis
DOI:
10.1002/sia.5353
Date:
February, 2014
File:
PDF, 2.32 MB
english, 2014