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Growth mode evolution of hafnium oxide by atomic layer deposition
Nie, Xianglong, Ma, Fei, Ma, Dayan, Xu, KeweiVolume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4832224
Date:
January, 2014
File:
PDF, 1.21 MB
english, 2014