Low cost photoelectron yield setup for surface process...

Low cost photoelectron yield setup for surface process monitoring

Hemmi, Adrian, Cun, Huanyao, Roth, Silvan, Osterwalder, Jürg, Greber, Thomas
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Volume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4866095
Date:
March, 2014
File:
PDF, 477 KB
english, 2014
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