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Structure of nitrogenated carbon films prepared from acetylene and nitrogen mixture in electron cyclotron resonance plasma
Bhattacharyya, Somnath, Vallée, C., Cardinaud, C., Turban, G.Volume:
87
Year:
2000
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.373018
File:
PDF, 401 KB
english, 2000