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[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - ALD honeycomb plates enabling robust ultrathin MEMS
Davami, Keivan, Zhao, Lin, Bargatin, IgorYear:
2014
Language:
english
DOI:
10.1109/MEMSYS.2014.6765673
File:
PDF, 1.85 MB
english, 2014