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[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - Electric gradient force drive mechanism for novel microscale all-dielectric gyroscope
Perahia, Raviv, Lake, Jonathan J., Iyer, Srikanth S., Kirby, Deborah J., Nguyen, Hung D., Boden, Tracy J., Joyce, Richard J., Huang, Lian X., Sorenson, Logan D., Chang, David T.Year:
2014
Language:
english
DOI:
10.1109/MEMSYS.2014.6765742
File:
PDF, 1.96 MB
english, 2014