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4814639 Super integration circuit device having a plurality of IC-chip equivalent regions formed on a single semiconductor substrate
Tomotaka Saito, Hiroaki Murakami, Yuhji Fukushima, Masami KonishiVolume:
29
Year:
1989
Language:
english
Pages:
1
DOI:
10.1016/0026-2714(89)90145-5
File:
PDF, 83 KB
english, 1989