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Complementary metal-oxide-semiconductor-compatible and self-aligned catalyst formation for carbon nanotube synthesis and interconnect fabrication
Zhang, Can, Yan, Feng, Bayer, Bernhard C., Blume, Raoul, van der Veen, Marleen H., Xie, Rongsi, Zhong, Guofang, Chen, Bingan, Knop-Gericke, Axel, Schlögl, Robert, Capraro, Bernard D., Hofmann, StephaVolume:
111
Year:
2012
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3694678
File:
PDF, 1.77 MB
english, 2012