Influence of frequency, pressure, and mixture ratio of...

Influence of frequency, pressure, and mixture ratio of electronegative gas on electrical characteristics of rf discharges in N2-SF6 mixtures

Kakuta, Shigeru, Petrović, Zoran Lj., Tochikubo, Fumiyoshi, Makabe, Toshiaki
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Volume:
74
Year:
1993
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.354326
File:
PDF, 1.35 MB
english, 1993
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