![](/img/cover-not-exists.png)
Influence of frequency, pressure, and mixture ratio of electronegative gas on electrical characteristics of rf discharges in N2-SF6 mixtures
Kakuta, Shigeru, Petrović, Zoran Lj., Tochikubo, Fumiyoshi, Makabe, ToshiakiVolume:
74
Year:
1993
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.354326
File:
PDF, 1.35 MB
english, 1993