Properties of reactively sputtered Ag, Au, Pd, and Pt...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2009 Vol. 27; Iss. 3

Properties of reactively sputtered Ag, Au, Pd, and Pt Schottky contacts on n-type ZnO

Lajn, A., Wenckstern, H. v., Zhang, Z., Czekalla, C., Biehne, G., Lenzner, J., Hochmuth, H., Lorenz, M., Grundmann, M., Wickert, S., Vogt, C., Denecke, R.
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Volume:
27
Year:
2009
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3086718
File:
PDF, 3.50 MB
english, 2009
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